Confocal Sensors in Coordinate Measuring Machines

Werth Messtechnik presents the integration of a confocal surface sensor in a multisensor coordinate measuring machine, the NanoFocusProbe NFP.

The NFP is used for the measurement of the geometry, shape, and roughness of microstructures, but also for radii of cutting edges of tools, or for coating thicknesses. It can be used both in the lab and on the production floor. The integration of the NFP was implemented in exclusive cooperation with Nanofocus AG. The sensor is fully integrated in the Werth multisensor concept and allows small probing deviations of just a few tens of nanometers. With the use of various optics, its capability with regard to accuracy and measurement range can be adjusted to suit the application.