Fraunhofer IPMS Expands Its 300-mm Platform for Quantum Chips with a New PVD System
Fraunhofer IPMS is expanding its 300-mm technology platform. A new PVD system is expected to accelerate the development of superconducting materials for future quantum computers.
The Fraunhofer Institute for Photonic Microsystems (IPMS) has expanded its 300-mm technology platform with a new PVD (Physical Vapor Deposition) system, thereby strengthening its activities in the field of quantum chip development. The system, installed in collaboration with Polyteknik, enables the deposition and optimization of superconducting thin films on 300-mm wafers under conditions modeled after industrial semiconductor manufacturing.
The goal is to advance the development of CMOS-compatible materials and processes for future quantum computers and to accelerate the transfer of promising technologies into industrial production. According to the institute, the new infrastructure represents a key building block for establishing a European quantum research facility.
Polyteknik’s Flextura system combines multiple coating processes and enables the development of complex material stacks consisting of metals, nitrides, and oxides. These materials form the basis for superconducting circuits and other key components of future quantum processors. Initial results already show promising properties of niobium nitride (NbN) and zirconium nitride (ZrN), which were deposited directly onto 300-mm wafers.
The platform is fully integrated into the 300-mm cleanroom environment at Fraunhofer IPMS and complements the activities of the Research Factory for Microelectronics Germany (FMD). In addition, it supports several European pilot line projects, including APECS, Supreme, and Spins, which are designed to strengthen the European ecosystem for semiconductor and quantum technologies.
In addition to research, industrial companies also benefit from the new infrastructure. They gain access to a state-of-the-art 300-mm R&D environment where materials, processes, and new device concepts can be tested under conditions that closely resemble future production environments. The goal is to accelerate the scaling of innovative quantum and semiconductor technologies toward mass production.
