Positioning System with High Long-Term Stability

In the semiconductor industry or photonics applications, components often need to be precisely positioned for each single processing step and then held in a stable position reliably. Similarly, the same also applies to samples during X-ray examinations. PI (Physik Instrumente) now offers a practical solution for those types of and similar applications with the SpaceFab Q-845:

The extremely accurate parallel-kinematic positioning system can not only position loads up to 1 kg in six degrees of freedom with nanometer precision, but also keep them in a long-term stable position. The basis of this is made up of six linear stages, which are arranged respectively in three 90-degree-offset double stacks acting on a motion platform. This allows them to achieve a maximum travel range of ±7 mm in the X and Y directions and ±5 mm in the Z direction. The rotation range of the three rotational axes are a maximum of ±7° (in θX, θY) or ± 8 degrees (in θZ). Piezoelectric inertia drives are the driving force for the linear stages. Thanks to their holding torque at rest, no energy is consumed while holding at the target position and no heat is generated. This means that the positioning systems are also suitable for applications in a vacuum (vacuum compatible to 10-6 hPa). Mounting of the long-term stable positioning system is possible in any spatial arrangement.