Miniature hexapod positioning system with six degrees of freedom

It is suitable for space-constrained multi-DOF applications that require fine positioning resolution, such as photonic component assembly and interconnection, optics inspection and alignment, optical wafer probing, aerospace and satellite sensor testing, and synchrotron sample alignment. and beamline applications. Other features include a load capacity of 7.5 kg with a locking force of 100 N, a large range of motion for easy integration into complex applications, and easy control and programming with virtual pivot adjustment. Fast settling times enable high throughput with repeat accuracies of less than 2 μm.