Confocal High Temperature Sensors IFS2407-HT/VAC
The confocal chromatic high-temperature sensors are designed for measurements in demanding environments.
The Confocal DT high-temperature sensor is the first optical sensor in Micro-Epsilon’s portfolio capable of withstanding high temperatures up to 200°C. Because they do not contain organic adhesives, these high-temperature sensors—made of stainless steel—are low-outgassing and therefore suitable for use in ultra-high vacuum (UHV) environments. The passive component design also facilitates measurements in a vacuum, as the sensors do not emit thermal radiation into the environment.
The innovative HT models are used for both displacement and distance measurement on reflective and diffuse surfaces, as well as for thickness measurement. In addition, the HT sensors offer impressive linearity of up to <±0.18 µm and high temperature stability of up to <0.1 µm/°C. This makes the confocal chromatic sensors ideal for measurement tasks in the semiconductor and electronics industries as well as in precision engineering.
Thanks to their compact design, the sensors are suitable for applications with limited installation space. Additionally, models with a 90° beam path are available to further reduce the required installation depth. The new sensors are available in the measurement ranges of 0.8 mm, 2 mm, and 4 mm and can be easily integrated into existing process systems. They are compatible with the confocal-chromatic IFC controllers.
