High-precision rotary axes with air bearings

In order to meet maximum payload and form factor requirements for use as a single-axis positioner, as part of an integrated system or even an integrated machine, various ABRX rotation axes with diameters of 100, 150 and 250 mm are available. They are therefore particularly suitable for maximum requirements in the areas of wafer inspection, high-precision metrology, optical inspection and manufacturing, and MEMS / nanotechnology device manufacturing.