“The Amcoss equipment is a replacement tool. Our goal is to significantly increase capacity and yield, compared to the tool we have been using so far, which will noticeably raise productivity. Furthermore, we need optimized wafer centering and more flexible application possibilities for 3" and 4" wafers. With this machine we are sure to reach these goals and to even increase quality and efficiency in wafer processing,” says Dr Jürgen Sebastian, site manager of Jenoptik Berlin where high-power diode lasers for medical applications, materials processing, R&D, and as pump sources for solid-state lasers are being produced.

Amcoss wafer processing equipment is configured according to individual customer needs and demands. Every tool is unique. “We do not build mass products, but each of our machines is a highly complex single piece. That is our strength,” explains company owner David Erne. “So, the amc 2000 for Jenoptik has been designed for highest throughput. With its dual arm handler and four load port stations for parallel operation of up to four processes, it absolutely is a high-throughput tool.” Besides a space-saving, integrated alignment-on-the-fly, a prealigner may be alternatively used, if flat orientation were necessary.

Another reason to decide for an Amcoss amc 2000 equipment is its flexible layout. It is a veritable bridge tool. Jenoptik is now capable to simultaneousely process different wafer sizes – especially the necessary 3" and 4" diameters – without adaptations when changing to another size. By fitting the tool with five dispense lines with an innovative, unique single-nozzle-gripper system and an additional syringe, flexibility has increased even more. Various hot and cool plates, a special vapor prime hot plate and an efficient EBR system, top off the configuration.

“We are very pleased, that a renowned company like Jenoptik has chosen us as their partner”, says David Erne. “The quality of their industry-leading diode lasers is based on most advanced manufacturing methods and process technologies, which we are delighted to support with our equipment and processes.”

In addition to the new Amcoss wafer processing tool, an amc 2500 equipment by Amcoss has been installed at the Jenoptik site in Dresden. So, sustainable support for equipment in use, as well as synergies for long-term service are guaranteed.