The inspection system with traverse paths of up to 720 mm allows the simultaneous inspection of several 300 mm wafers or individual substrates measuring up to 700 x 700 mm at top speeds of up to 1,000 mm/s. Ironless direct drives make this high speed possible. Thanks to the repeat accuracy of 0.3 µm, precise measurement results and enormous increases in quality can be achieved. The Z-axis was designed for sensors and camera systems up to 5 kg. The vertical adjustment can be either fixed, manual, motorized with a spindle or dynamic with a pneumatically balanced direct drive for height compensation with fully interpolated movement. The test piece support can also be adapted to the specific application. You can choose between a ground plate, a plate with a drill pattern and a chuck.