New pressure measuring cells

In particular, the SM97A should be mentioned as the successor to the SM98A for 10 and 20 bar.

In contrast, the lowest differential pressures of less than 0.15 psi to 1.5 psi (10 mbar ¬– 100 mbar) can be measured with the SM95G. To increase the sensitivity, these low-pressure measuring cells have incorporated a rigid membrane center through micro-structuring of the measuring cell. Additional masking and etching at the end of the manufacturing process make it possible to structure the membrane in a relief-like manner on the back and to reinforce it in the center. This gives the back of the membrane a symmetrical thickening of the surface. The lateral dimensions, the thickness and the evenness of this thickening are critical parameters that have to be controlled and optimized in a complex manner.